000 00295nam a2200109Ia 4500
008 230401s9999 xx 000 0 eng d
100 _aCAMPBELL(STEPHEN A )
245 4 _aTHE SCIENCEAND ENGINEERING OF MICRO ELECTRONIC FAB
250 _a2
260 _bOXFORD UNIVERSITY PRESS
942 _2ddc
_cBTECH
999 _c4812
_d4812